Surface heating control during low-temperature plasma treatment

نویسندگان

چکیده

The main features of the process reflecting product surface heating during low-temperature plasma treatment have been established, and necessity managing this has substantiated. A control method developed that makes it possible to determine moment termination effect on using a logistic curve as data model temperature recorded outside zone thermal (lagged temperature).

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ژورنال

عنوان ژورنال: Journal of physics

سال: 2021

ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']

DOI: https://doi.org/10.1088/1742-6596/1954/1/012004